Full Automatic Unstacking And Optical Inspection In A Single Tool
Description of the Opto System Laser Diode Bar Unstacker With Optical Inspection VKSV3000
The full automatic bar unstacker VKSV3000 integrates two tasks in one machine. It has a dedicated geometry for unstacking bars from a jig but it also takes high resolution pictures of the p-side and both facets. The jig is placed in the jig station after coating, the tool picks up the laser bars from the jig, separates them from the spacers with various mechanisms and sorts them on different tapes or GelPaks according to the visual inspection criteria. The visual inspection takes place in a dedicated vibration-free inspection stage that increases resolution down to 1µm defect size recognition, even though while other parts of the machine are moving. Multiple jig stations enable parallel processing and quick turnover. The jig is easy to handle and is designed to allow plasma coating on both facets.